Plasma Etching Systems

 

 

 

Why we need Plasma?


PECVD systems

&

VHF coating process

PIII system

 
 

Electron Beam Evaporation system

 

ICP Sources for Deep RIE Appications


Sputtering Packages

Components


Microwave Generators and Components

  • Generators:300 W, 1.2 kW, 2 kW, 6 kW,...

  • Circulators

  • Tuners

  • Directional Couplers

  • Microwave Leak detectors,  etc

    • Ion Source